Varian Associates, Inc.

Mars Hablanian

Fausto Casaro

Giampaolo Levi

Luigi Dolcino

A high vacuum pump comprising an in-line connection on a single drive shaft of an axial turbomolecular compressor and a peripheral compressor where the pump provides better than 10.sup.-7 Pascal inlet when exhausting to atmosphere. The peripheral compressor has a two stage optimized Gaede design which encloses the impellers in a shroud reducing the top and bottom volume surrounding the impellers and providing a large separation pressure drop region between stages of said peripheral compressors to reduce axial leakage.

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Wellesley, MA, United States of America

Mars Hablanian