Brooks Automation Gmbh

Jenoptik Gmbh

Marlies Mages

Erich Adler

Klaus Schultz

Alfred Schulz

Andreas Berger

A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty operation and faulty loading in a simple manner while guaranteeing technical cleanroom requirements and without limiting the clear space of the platform. An arrangement for detecting the presence of a container and for distinguishing between containers with different contents is provided for an expectancy area above the platform. The device is used for the loading and unloading at machining or processing stations of objects that are to be transported in a container, especially objects in the fabrication process for integrated circuits.

Docking station for substrate transport containers

A safety device for a moving system with a drive in which a pneumatically operated piston, by linear movement in a cylinder, moves a transported object past a stationary part in at least one direction has the aim of generating a switching signal at every point of a through-opening when an obstacle is located between the moving object and the edge of the through-opening, regardless of the movement direction of the object and the geometrical construction of the through-opening. The cylinder has, at its ends, devices for measuring the pressure of the air flowing out of the cylinder in the movement direction of the piston, wherein a drop in the otherwise substantially constant pressure below a threshold value serves as a switching signal at least for switching off the system. The device is useful for safety purposes during the transport of objects, particularly when the objects form shearing edges with neighboring objects.

Safety device for a moving system

Device for transporting wafer magazines

Growing community of inventors

Jena, Germany

Marlies Mages