Sunedison Semiconductor Limited (uen201334164h)

Markus Jan Peter Siegert

John Francis Valley

Benno Orschel

Andrey Melnikov

A method performs phase shift interferometry to detect irregularities of a surface of a wafer after the wafer has been placed into an interferometer and while the wafer is vibrating. Additionally, a system and a non-transitory computer-readable storage medium have computer-executable instructions embodied thereon for performing phase shift interferometry to detect irregularities of a surface of a wafer after the wafer has been placed into an interferometer and while the wafer is vibrating.

Systems and methods for performing phase shift interferometry while a wafer is vibrating

A computer-implemented method for arranging numeric data for compression is described. The method is implemented using a computing device in communication with a memory and a measurement device. The method includes receiving, by the computing device and from the measurement device, numeric data that includes a sequence of numbers, each number including at least a first byte followed by a second byte. The method additionally includes arranging the first bytes into a first contiguous set, arranging the second bytes into a second contiguous set, and storing the first contiguous set and the second contiguous set in a file in the memory, such that the first contiguous set is contiguous with the second contiguous set.

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Key West, FL, United States of America

Markus Jan Peter Siegert