Applied Materials, Inc.

Markus J Stopper

Asaf Schlezinger

Disclosed herein are a substrate sorter, an inspection and sorting system having the substrate sorter, and a method for the inspection and sorting system. The substrate sorter includes an annular gripper comprising a rotator and a plurality of vacuum applicators concyclically disposed around an axis, a carrier operable to move a substrate towards the rotator and into a loading region below the rotator, and an actuator coupled with the annular gripper and operable to rotate the rotator about the axis relative to the plurality of vacuum applicators while one or more of the plurality of vacuum applicators hold the substrate against the rotator.

High speed substrate sorter

Embodiments herein generally relate to inspection systems for substrates or wafers for solar cell applications. The inspection system is configured to analyze substrates or wafers for chips, cracks, and other defects. The system includes conveyor apparatuses, and the conveyor apparatuses include one or more conveyor elements. The conveyor elements are configured to transport rectangular wafers having a width between about 175 mm to about 250 mm. The conveyor elements include a first conveyor belt and a second conveyor belt to transport the substrates. The spacing of the belts reduces vibrations of the substrate edge.

Inspection system

A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module is disclosed that includes a loading station for two or more substrate cassettes, a first lane comprising a first conveyor that is substantially aligned with one of the two or more substrate cassettes and a conveyor system, a second lane comprising a second conveyor that is substantially aligned with another of the two or more substrate cassettes and positioned in a spaced-apart relation relative to the first lane, and a lateral transfer module positioned between the first lane and the second lane that is adapted to move substrates from the second lane to the first lane.

Method and apparatus for continuous substrate cassette loading

Embodiments of the present disclosure generally relate an apparatus for inspecting and sorting a plurality of substrates. The apparatus includes a sorting unit, a first conveyor lane disposed within the sorting unit in a first direction and a first plane, and at least a second conveyor lane disposed within the sorting unit, the second conveyor lane positioned in a second direction at an angle of greater than about 45 degrees relative to the first direction, wherein the second conveyor lane is positioned in a second plane that is different than the first plane.

Linear sorter using vacuum belt

A substrate rotator configured to rotate one or more substrates includes a body, a body actuator coupled to the body and configured to rotate the body, and a first and second gripper coupled to the body. A substrate edge metrology system that measures side chips or other defects on all sides of the substrate is also described. The metrology system includes two metrology stations and the substrate rotator. Methods for measuring side chips or other defects on a substrate are also provided. The method includes performing metrology on a first set of sides of the first substrate, rotating the first substrate by a first angle, and performing metrology on the second set of sides of the first substrate.

Conveyor inspection system, substrate rotator, and test system having the same

An apparatus and method for sorting a plurality of substrates is disclosed. The apparatus includes a sorting unit capable of supporting a plurality of bins, a rotatable support disposed within the sorting unit, the rotatable support rotatable about a rotational axis, a plurality of grippers coupled to the rotatable support on a common radius relative to the rotational axis, the grippers positioned to travel along a path above the bins as the rotatable support rotates, and an air nozzle configured to reorient a sorted substrate relative to a stacked substrate in a bin of the plurality of bins when released by one of the grippers into the bin.

Substrate tilt control in high speed rotary sorter

Embodiments disclosed herein generally relate to a conveyor inspection system and a method of sorting a substrate. The conveyor inspection system includes a moveable conveyor and a rapid conveyor. The moveable conveyor is configured to transfer undesired substrates to the rapid conveyor. The method includes determining that the substrate is undesirable for entry into a modular inspection unit, transferring the substrate to a rapid conveyor in response to determining that the substrate is undesirable for entry into the modular inspection unit, and transporting the substrate on the rapid conveyor. The conveyor inspection system and method remove substrates from the test system upon first entering the test system, which reduces time wasted in analyzing undesired substrates that would be discarded.

Embodiments of the present disclosure generally relate to expandable substrate inspection systems. The inspection system includes multiple metrology units adapted to inspect, detect, or measure one or more characteristics of a substrate, including thickness, resistivity, saw marks, geometry, stains, chips, micro cracks, and crystal fraction. The inspection systems may be utilized to identify defects on substrates and estimate cell efficiency prior to processing a substrate. Substrates may be transferred through the inspection system and/or between metrology units on a track or conveyor, and then sorted via at least one gripper coupled with the high speed rotatory sorting apparatus into respective bins based upon the inspection data. The rotary sorting apparatus maintains a sorting capability of at least 5,400 substrates per hour. Each bin may optionally have a gas support cushion for supporting the substrate as it falls from the rotary sorting apparatus into the respective bin.

High speed rotary sorter

A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection system is provided that includes a first conveyor module, and a second conveyor module having a movable surface positioned substantially parallel to a movable surface of the first conveyor module, wherein the first conveyor module includes a first section and a second section, the first section having a vacuum unit operable to secure a substrate to a portion of the movable surface in the first section, and the second section is configured to release the substrate from the movable surface.

Vacuum conveyor substrate loading module

In one example, a sorting unit includes a sorting system and a plurality of bins into which substrates are sorted. The sorting unit includes a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin. In one example, a method of operating a sorting unit is also provided.

Automation for rotary sorters

A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection station is disclosed herein. The loading module includes two arms, a plurality of substrate grippers, two rotatable support members, a conveyor, and at least one actuator. Each arm has a first end and a second end, wherein the second end is opposite the first end. Each substrate gripper is disposed at a respective end of each arm. Each rotatable support member is coupled to a respective one of the arms. The conveyor is disposed between the rotatable support members. The at least one actuator is configured to rotate the arms about the rotatable support members to selectively position the grippers over the conveyor in a location that allows a substrate held by the gripper to be released onto the conveyor.

Substrate rotary loader

Embodiments of the present invention generally relate to methods for inspecting wafers. After a brick is sliced into a plurality of bare wafers, a two-dimensional (2D) photoluminescence (PL) image of each wafer is taken, the PL images of the wafers in sequential order (i.e., the sequence of the wafers as they are sliced from the brick) are then combined to construct a three-dimensional (3D) model of the brick that highlights similar regions in the brick.

Growing community of inventors

Voerstetten, Germany

Markus J Stopper