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Katholieke Universiteit Leuven, Ku Leuven R&d

Katholieke Universiteit Leuven

Markus Heyne

Annelies Delabie

Matty Caymax

Method of producing one or more transition metal dichalcogenide (MX) layers on a substrate, comprising the steps of: obtaining a substrate having a surface and depositing MXon the surface using ALD deposition, starting from a metal halide precursor and a chalcogen source (HX), at a deposition temperature of about 300&#xb0; C. Suitable metals are Mo and W, suitable chalcogenides are S, Se and Te. The substrate may be (111) oriented. Also mixtures of two or more MXlayers of different compositions can be deposited on the substrate, by repeating at least some of the steps of the method.

Method of producing transition metal dichalcogenide layer

A method is provided for forming a feature of a target material on a substrate. The method including:

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Leuven, Belgium

Markus Heyne