Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Markus Herz

Martin Richter

Martin Wackerle

Manuel Sutter

Peter Holzbauer

A method of manufacturing a bending transducer having a drive element and a membrane includes providing the membrane and the drive element and applying a production signal to the drive element during a bonding of the drive element to the membrane such that the drive element is pre-stressed after the bonding, wherein the production signal is of a same kind as an operation signal to operate the bending transducer.

Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve

A pump for pumping a medium from a suction side to a pressure side includes a filter arrangement. The filter arrangement includes an inflow path, a first outflow path, and a second outflow path. A hydrophobic membrane filter is arranged between the inflow path and the first outflow path. A hydrophilic membrane filter is arranged between the inflow path and the second outflow path. At least one section of the hydrophobic membrane filter and one section of the hydrophilic membrane filter are located opposite each other at a distance of no more than 1 mm so that a gas bubble that moves along with a medium flowing in the inflow path comes into contact with the hydrophobic membrane filter during the movement. The first and second outflow paths of the filter arrangement are connected to the suction side of the pump.

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Munich, Germany

Markus Herz