Oerlikon Leybold Vacuum Gmbh

Leybold Vakuum Gmbh

Leybold Gmbh

Markus Henry

Christian Beyer

Heinz Englaender

Heinrich Engl&auml;nder

Gunter Schutz

Ralf Adamietz

Hans-Rudolf Fischer

Gerhard Wilhelm Walter

Peter Klingner

Jürgen Brezina

Heinz Engländer

Robert Stolle

Peter Koeppel

Rainer Hoelzer

A multi-inlet vacuum pump has a first pump device () and a second pump device (). The first pump device () includes a first rotor element () having a plurality of first rotor discs () arranged consecutively in the delivery direction (). The second rotor disc includes a second rotor element () having a plurality of second rotor discs () arranged consecutively in the delivery direction (). A first fluid flow () is suctioned through a main inlet () by the first pump device () and delivered in the direction of the second pump device (). A second fluid flow () is suctioned through an intermediate inlet () by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc () of the first pump () substantially corresponds to the diameter of the first rotor () of the second pump device ().

Multi-inlet vacuum pump

A multi-inlet vacuum pump includes a first pump device () including a first rotor element () with a plurality of first rotor disks () serially arranged in the conveying direction (), and a second pump device () including a further rotor element () with a plurality of second rotor disks () serially arranged in the conveying direction (). A diameter of the second rotor disks () is at least partially larger than a diameter of the first rotor disks (). A main inlet () sucks in a first fluid stream () with the first pump device (). The first fluid stream () is conveyed in the direction of the further pump device (). An intermediate inlet () sucks in a second fluid stream () with the second pump device (). The second fluid stream () is conveyed in the direction of a pump outlet. A process of merging the two fluid streams () will occur within the second pump device (), preferably between two adjacent second rotor disks () of the second pump device ().

A stator-rotor arrangement for a vacuum pump, in particular for a turbomolecular pump, includes a plurality of stator disks () that cooperate with a rotor element (). The stator disks () are disposed between rotor disks (). The stator disks () are held by way of stator rings (). At least two of the stator rings () include protrusions () that are connected together by way of holding elements (). This makes pre-installation of the rotor-stator arrangement () or placement of the rotor-stator arrangement () in a housing () possible. The protrusions () are disposed in the area of corners () of the housing ().

Stator-rotor arrangement for a vacuum pump and vacuum pump

The invention refers to a mass spectrometer arrangement () comprising a housing () having a mass spectrometer forevacuum vacuum chamber () with a mass spectrometer forevacuum outlet (), at least two mass spectrometer high-vacuum vacuum chambers (), and an integrated turbomolecular pump () connected with the high-vacuum vacuum chambers () and having a forevacuum outlet (). The two forevacuum outlets () open into a common forevacuum chamber () in the housing (), which in turn opens into a housing outlet ().

Mass spectrometer arrangement

The invention relates to a friction vacuum pump ( ) with a stator ( ) and a rotor ( ), which form at least two pump stages ( ) with one gas inlet ( ) each, as well as with junction for the pump stages, which are equipped with junction openings ( ) and serve for the connection of the gas inlets ( ) of the pump stages with devices to be evacuated; in order to avoid high conductance losses it is proposed that the junction openings ( ) are located in a plane which is disposed laterally adjacent to the pump stages ( ) such that the distance between the junction openings ( ) and the rotor axis ( ) is of minimum feasible size.

Friction vacuum pump with a stator and a rotor

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Cologne, Germany

Markus Henry