Applied Materials, Inc.

Applied Materials Gmbh & Co Kg

Markus Hanika

Tobias Stolley

Stefan Bangert

Wolfgang Buschbeck

Andreas Lopp

Marcus Bender

Fabio Pieralisi

Andreas Klöppel

Evelyn Scheer

Michael Konig

Guido Mahnke

Bernhard Stock

Ferdinand Füller

Karl-Albert Keim

Harald Rost

Jurgen Schroeder

Apparatuses for deposition of one or more layers. In one aspect, an apparatus for deposition of one or more layers includes an anode; a cathode; a vacuum chamber including the anode and the cathode; a sensor configured to detect an electric potential between a section of the at least one anode and a section of the chamber. Furthermore, methods to monitor a device for deposition of one or more layers are also described.

Apparatus and method for detecting a state of a deposition apparatus

This invention relates to an apparatus () for treating, e.g. coating, a substrate () in a vacuum chamber (). In this vacuum chamber () there are arranged n cathodes (-) and n+1 anodes (-), each of said anodes adjacent to a cathode (-). Each of the n cathodes (-) and n of the assigned anodes (-) are connected to a power supply (-). One of the anodes () not being assigned to a cathode (-) is connected to an electrical line () which is connecting each of the anodes (-). A pull-down resistor () is connected to said line () at its one end and to ground () at its other end.

Apparatus for treating a substrate

The invention relates to a method for operating a magnetron sputter cathode, in particular a tube cathode or several tube cathodes forming an array. In such cathodes a target passes through a magnetic field, whereby induction currents flow in the target which distort the magnetic field. This results in the nonuniform coating of a substrate. By having the relative movement between magnetic field and target alternately reverse its direction, the effect of the magnetic field distortion can be compensated. This yields greater uniformity of the coating on a substrate to be coated.

Method for operating a sputter cathode with a target

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Landsberg, Germany

Markus Hanika