Steinbichler Optotechnik Gmbh

Nanda Technologies Gmbh

Instrument Systems Optische Messtechnik Gmbh

Markus Estermann

Christoph Kappel

Lars Markwort

Thomas Mayer

Reto Haring

Florian Schewe

Reza Kharrazian

Felix Frank

Amy M Winkler

Markus Steinbichler

Corin Michael Ricardo Greaves

The invention relates to an apparatus for generating light, comprising a plurality of light sources (), &#x2014;a control device (), which drives the light sources (), and a superimposition optical unit, which superimposes the light emitted by the light sources () in an exit opening (). It is an object of the invention to provide an apparatus which is improved compared with the prior art. For this purpose, the invention proposes that the superimposition optical unit comprises a first concave mirror (), in the focal plane of which the light sources () are situated, an optical grating (), onto which the first concave mirror () reflects the light () emitted by the light sources (), and &#x2014;a second concave mirror (), which reflects the light () diffracted at the optical grating () onto the exit opening () situated at the focus of the second concave mirror ().

Light source having a controllable spectrum

A method of inspecting a bonded waferarrangement comprises:

Methods and systems for inspecting bonded wafers

A method serves for the determination of the 3D coordinates of an object (). A fringe pattern is projected onto the object () in the method. The light reflected by the object () is recorded and evaluated. To improve such a method, the fringe pattern is projected onto the object () by an imaging element (only FIGURE).

Method and an apparatus for the determination of the 3D coordinates of an object

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Babensham, Germany

Markus Estermann