Carl Zeiss Smt Gmbh

Markus Deubel

Johannes Kraus

Oliver Gloeckl

An optical assembly reduces a spectral bandwidth of an output beam of a laser. The assembly includes a beam-expanding optical unit within a laser resonator. The latter serves to increase a beam cross section of a resonator-internal laser beam in at least one expansion cross-sectional dimension such that at least one resonator-internal expansion laser beam section arises. The assembly also includes an optical grating in a retroreflective arrangement for the resonator-internal laser beam. A beam-limiting stop acts in the expansion cross-sectional dimension and is arranged in the beam path of the expansion laser beam section. This yields an optical assembly in which unwanted thermal effects on account of optical components of the optical assembly heating during laser operation due to a local power density of the resonator-internal laser beam are reduced or avoided.

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Aalen, Germany

Markus Deubel