Pdf Solutions, Incorporated

Markus Decker

Christopher Hess

Dennis Ciplickas

Larg H Weiland

Brian E Stine

A test structure combines a first structure () for erosion evaluation with a second structure () for extraction of defect size distributions. The first structure () is a loop structure usable determine a resistance value that varies with metal height. The second structure is a NEST structure (). Loop lines of the loop structure () are connected on both sides of the NEST structure ().

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Munich, Germany

Markus Decker