Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Eagleburgmann Germany Gmbh & Co. Kg

Markus Armgardt

Lothar Schäfer

Markus Höfer

Tino Harig

Artur Laukart

Andreas Schrüfer

Joachim Otschik

Dieter Ziegenbein

Jörg Thelke

Rudolf Kollinger

Wolfgang Berger

Peter Radulescu

The present invention refers to a seal ring for a mechanical seal, comprising: a base body () with a diamond layer () which is applied to the base body () and configured as a sliding surface, wherein the diamond layer () has a thickness (D) which is less than or equal to 4 &#x3bc;m, particularly less than or equal to 3 &#x3bc;m, particularly less than or equal to 2 &#x3bc;m, particularly preferably about 1 &#x3bc;m, and wherein the base body () is without fissures or only comprises fissures that have a maximum longitudinal extension (L) on a surface of the base body () or in the base body () that is less than or equal to 5 &#x3bc;m.

Low-friction seal ring with inexpensive diamond coating

A coating installation containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device to be virtually immobile relative to the recipient. In a corresponding method, an electric current can be supplied to the activation element via at least two contact elements and at least one of the contact elements is designed to contact the activation element in alternating contact points.

Coating device and coating method

A coating installation includes at least one recipient which can be evacuated and which is provided to receive a substrate, at least one gas supply device which can introduce at least one gaseous precursor into the recipient, and at least one activation device which contains at least one heatable activation element, the end thereof being secured to a securing point on a support element. A shielding element which can protect at least the securing point at least partially against the effect of the gaseous precursor is provided. The shielding element has a longitudinal extension having a first side and a second side, the first side being arranged on the support element and a locking element being arranged on the second side of the shielding element, the locking element having at least one outlet. At least one separation wall is arranged inside the shielding element, the wall separating the inner volume of the shielding element into a first partial volume and into a second partial volume.

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Braunschweig, Germany

Markus Armgardt