Sitec Gmbh

Mark William Dassel

By incorporating an additional TCS and/or DCS redistribution reactor in the TCS recycle loop and/or DCS recycle loop, respectively, of a process and system for silane manufacture, efficiencies in the production of silane are realized.

System and process for silane production

A catalytic process for converting silicon tetrachloride (STC) into trichlorosilane (TCS) utilizes a metal catalyst such as metal silicide at a low temperature such as 500 C, where the STC is reacted with hydrogen gas in the presence of catalyst and under non-thermal equilibrium conditions, to provide for a product gas stream that includes TCS at levels exceeding those obtained at thermal equilibrium, as well as optionally including HCl and unreacted STC.

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Poulsbo, WA, United States of America

Mark William Dassel