Koninklijke Philips Corporation N.v.

Asml Netherlands B.v.

Mark Van Schijndel

Patrick Warnaar

Pierre Hermanus Woerlee

Ruud Vlutters

Michael Kubis

Guofu Zhou

Wilhelmus Robert Koppers

Johannes Cornelis Norbertus Rijpers

Antonius Emilius Theodorus Kuiper

Johannes Henricus Jocephus Roosen

A target structure including a periodic structure is formed on a substrate. An image of the target structure is detected while illuminating the target structure with a beam of radiation, the image being formed using a first part of non-zero order diffracted radiation while excluding zero order diffracted radiation. Intensity values extracted from a region of interest within the image are used to determine a property of the periodic structure. A processing unit recognizes locations of a plurality of boundary features in the image of the target structure to identify regions of interest. The number of boundary features in each direction is at least twice a number of boundaries of periodic structures within the target structure. The accuracy of locating the region is greater than by recognizing only the boundaries of the periodic structure(s).

Metrology method and apparatus, and device manufacturing method

A rewritable optical record carrier comprising a first substrate carrying a first recording stack of layers, which recording stack comprises, a first dielectric layer, a recording layer comprising a phase-change recording material, a second dielectric layer, and a metal mirror layer. In order to achieve a maximum R*M said first dielectric layer has a thickness din the range of 20 nm to 50 nm, and said second dielectric layer has a thickness daccording to the relation 0.0225*d&#x2212;2.6572*d+173.3 (nm)&#x3c;d&#x3c;0.0225*d&#x2212;2.6572*d+213.3 (nm) when the mirror layer comprises aluminum, or a thickness daccording to the relationship 0.0191*d&#x2212;2.0482*d+149.6 (nm)&#x3c;d&#x3c;0.0191*d&#x2212;2.0482*d+189.6 (nm) when the mirror layer comprises silver.

Rewritable optical record carrier

A description is given of a multi-stack optical data storage medium () for rewritable recording using a focused radiation beam () entering through an entrance face () of the medium () during recording. The medium () has a substrate (). Deposited on a side thereof is a first recording stack () with a phase-change type recording layer (). The first recording stack () is present at a position most remote from the entrance face (). At least one further recording stack (), with a phase-change type recording layer () is present closer to the entrance face () than the first recording stack (). A metal reflective layer of Cu, transparent for the radiation beam (), is present in the further recording stack () and has a thickness between 2 and 10 nm. A transparent spacer layer () is present between the recording stacks (). In such a way a metal reflective layer () with a high optical transmission combined with sufficient heat sink action is achieved which furthermore has a low chemical reactivity with adjacent layers.

Multi-stack optical data storage medium and use of such medium

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Eindhoven, Netherlands

Mark Van Schijndel