Asml Netherlands B.v.

Mark Scholten

Erik Roelof Loopstra

Sven Antoin Johan Hol

Angelo Cesar Peter De Klerk

Fransicus Mathijs Jacobs

Arjan Franklin Bakker

Petrus Mathijs Henricus Vosters

Jacob Kleijn

Stephan Christiaan Quintus Libourel

Mark Petrus Ubbink

Ilya Malakhovskiy

Martinus Josephus Theodorus Maria Cortenbach

A method for radiation beam welding of a first member to a second member of a cooling body for an electromagnetic actuator. The first member on a side thereof comprises a surface portion provided with a recess, which is delimited by a periphery, and wherein the second member comprises a substantially continuous first surface portion complementary to the surface portion of the first member in order to close off the recess, the second member being provided with a second surface portion opposite to the first surface portion. The method comprising arranging the first and second member such that the first surface portion engages with the surface portion of the first member; providing a radiation beam, directing the radiation beam towards the second surface portion such that the first and second member are welded together at the periphery of the recess.

Radiation beam welding method, body and lithographic apparatus

A lithographic apparatus includes an illumination system configured to condition a radiation beam and a support constructed to support a patterning device. The patterning device may be capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam. The lithographic apparatus further includes a substrate table constructed to hold a substrate and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. The lithographic apparatus may be provided with a composite material wherein a layer of carbon fiber and a layer of titanium is provided within the composite.

Lithographic apparatus, composite material and manufacturing method

A cooling apparatus is described that has a first cooling structure, in thermal contact with a heat source having a temperature greater than a cool structure, including a channel through which a cooling fluid is passed, an isolator between the heat source and the cool structure, the isolator in thermal contact with the first cooling structure and including a material of low thermal conductivity, and a second cooling structure between the isolator and the cool structure, the second cooling structure including a channel through which cooling fluid is passed.

Apparatus for cooling

A motor includes a magnet assembly to generate a magnetic field. The field includes along the first direction parts which are alternately orientated in the first and the second direction. The parts extend in a third direction which is perpendicular to the first and the second direction. The motor further includes a first coil winding to carry a first current. The first coil winding to extend in the first direction between parts of the magnetic field orientated in the second direction, to generate the force in the first direction. The motor also includes a second coil winding to carry a second current. The second coil winding to extend in the first direction between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction.

Lithographic apparatus and motor

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Einighausen, Netherlands

Mark Scholten