Analog Devices,inc.

Analog Devices Global

Analog Devices Global Unlimited Company

Mark Schirmer

Padraig Fitzgerald

Raymond C Goggin

Jo-ey Wong

Alan J O'Donnell

Bernard Patrick Stenson

Michael C W Coln

Ying Zhao

Thomas W Kelly

Bruce A Hecht

Michael James Twohig

James Thomas Sheeran

Paul W Stevens

Olly J Kierse

David Rohan

Paul Martin Lambkin

Check F Lee

John Dixon

Padraig L Fitzgerald

Raynond C Goggin

Raymond Goggin

Optically isolated micromachined (MEMS) switches and related methods are described. The optically isolated MEMS switches described herein may be used to provide isolation between electronic devices. For example, the optically isolated MEMS switches of the types described herein can enable the use of separate grounds between the receiving electronic device and the control circuitry. Isolation of high-voltage signals and high-voltage power supplies can be achieved by using an optical isolator and a MEMS switch, where the optical isolator controls the state of the MEMS switch. In some embodiments, utilizing optical isolators to provide high voltages, the need for electric high-voltage sources such as high-voltage power supplies and charge pumps may be removed, thus removing the cause of potential damage to the receiving electronic device. In one example, the optical isolator and the MEMS switch may be co-packaged on the same substrate.

System comprising a package having optically isolated micromachined (MEMS) switches with a conduit to route optical signal to an optical receiver and related methods

Optically isolated micromachined (MEMS) switches and related methods comprising a light transmitting adhesive layer between an optical receiver and a light source

Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.

MEMS switch

A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base.

MEMS swtich with internal conductive path

A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.

MEMS switch capping and passivation method

A method of producing an electronic device electrically and mechanically couples an integrated circuit to a leadframe to produce an intermediate assembly. At least a portion of the intermediate assembly then is encapsulated with a molten encapsulating material. After it is encapsulated, the method permits the molten encapsulating material to substantially solidify. A method of detecting the orientation of a sensor as mounted to an external object also is disclosed.

Motion detector and method of producing the same

A motion detector capable of sensing motion of an object includes a motion sensor secured to one of a plurality of surfaces of a fastener. The fastener is directly coupleable with the object.

Integrated fastener and motion detector

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Stoughton, MA, United States of America

Mark Schirmer