Applied Materials, Inc.

Mark Roger Covington

Ronald Vern Schauer

Amitabh Puri

Suresh Kumaraswami

Vivek Vinit

Lizhong Sun

Brian T West

Yan Rozenzon

Roger M Johnson

Soundarrajan Jembulingam

Xiaodong Yang

Simon Nicholas Binns

Miroslav Gelo

Vishal Agrawal

Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.

Pedestal lift for semiconductor processing chambers

The present disclosure provides methods for forming a metal containing material onto a substrate with good film uniformity and stress profile across the substrate. In one embodiment, a method of sputter depositing a metal containing layer on a substrate includes supplying a gas mixture into a processing chamber, forming a first portion of a metal containing layer on a substrate, transferring the substrate from the processing chamber, rotating the substrate, transferring the substrate back to the processing chamber, and forming a second portion of the metal containing layer on the first portion of the metal containing layer.

Method and apparatus for depositing a metal containing layer on a substrate

Embodiments of the invention are directed toward systems and methods that execute legacy semiconductor applications using a non-legacy controller. In some embodiments a hardware abstraction layer and/or an emulator can be used to provide communication between a non-legacy operating system and legacy components including legacy applications. In some embodiments various methods and/or devices can be used to emulate and/or translate communications between legacy and non-legacy components.

Enhanced re-hosting capability for legacy hardware and software

Growing community of inventors

Sunnyvale, CA, United States of America

Mark Roger Covington