USA As Represented by Secretary of the Navy

Mark Ray

Arthur W Snow

James R Griffith

Leonard J Buckley

A metallization is coated with a network polymer. The network polymer may either a cross-linked polyfluorinated polyallylether-polyhydromethylsiloxane copolymer or a network polymer formed from cross-linked fluoromethylene cyanate ester monomers. These polymer networks are resistant to the diffusion of a metallization, such as copper, therethrough.

Inter-level dielectrics with low dielectric constants

A metallization is coated with a network polymer. The network polymer may be either a cross-linked polyfluorinated polyallylether-polyhydromethylsiloxane copolymer or a network polymer formed from cross-linked fluoromethylene cyanate ester monomers. These polymer networks are resistant to the diffusion of a metallization, such as copper, therethrough.

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Cary, NC, United States of America

Mark Ray