International Business Machines Corporation

Mark P Murray

Anthony K Stamper

David V Horak

Robert Michael Geffken

Michael Joseph MacDonald

Vincent James McGahay

Edward Crandal Cooney, Iii

William Thomas Motsiff

Thomas L McDevitt

Christy Sensenich Tyberg

William A Klaasen

David C Thomas

Amanda L Piper

Elizabeth T Webster

Kirk David Peterson

Mahadevaiyer Krishnan

Thomas George Ference

William Francis Landers

Jonathan Daniel Chapple-Sokol

Cuc Kim Huynh

Paul M Feeney

Walter E Mlynko

Timothy Scott Chamberlin

A slurry containing abrasive particles, an oxidizing agent having a low static etch rate on at least one acid or salt metal, and having a pH of about 5 to about 11 is especially useful for polishing surfaces, including both metal and silicon dioxide, such as present in microelectronics, at the same or substantially the same polishing rates.

Slurry and use thereof for polishing

A method of reworking BEOL (back end of a processing line) metallization levels of damascene metallurgy comprises forming a plurality of BEOL metallization levels over a substrate, forming line and via portions in the BEOL metallization levels, selectively removing at least one of the BEOL metallization levels to expose the line and via portions, and replacing the removed BEOL metallization levels with at least one new BEOL metallization level, wherein the BEOL metallization levels comprise a first dielectric layer and a second dielectric layer, and wherein the first dielectric layer comprising a lower dielectric constant material than the second dielectric layer.

Single and multilevel rework

An interconnection structure preferably including one or more conductors that have a central region filled with an insulator, and a method of fabricating such an interconnection structure for preferably making an electrical connection to the conductor(s). The method preferably includes the steps of depositing and patterning a first insulator over a substrate to form an aperture opening to the substrate; depositing and polishing a first conductor to leave the first conductor in the aperture; depositing and patterning a second insulator to form an opening through the second insulator and a recess in the aperture; depositing one or more second conductors to line the opening and the recess, and to form a central region of the interconnection structure; depositing a third insulator to at least partially fill the central region; and making an electrical connection to the second conductor(s).

Interconnection structure and method for fabricating same

A method and structure is described which improves the manufacturability of integrated circuit interconnect and stud contacts in contact with semiconductor substrates and upper levels of metallization. The monolithic structure is formed from a thick layer of refractory metal. A variation in the monolithic structure is in the use of a dual damascene local interconnect portion of the structure which allows the local interconnect to pass over structures previously formed on the substrate.

Metallurgy for semiconductor devices

A process of planarizing the surface of a semiconductor substrate. The process begins by forming patterned raised and recessed regions on the surface of the semiconductor substrate. A layer of material then is formed over the patterned raised and recessed regions. The layer is subjected to a chemical mechanical planarizing (CMP) process step until all of the raised regions are at least partially removed from the layer. Finally, the surface of the polished substrate is etched with a reactive ion etching (RIE) process.

Combined chemical mechanical polishing and reactive ion etching process

A slurry containing abrasive particles and a pH buffering component comprising at least one acid or salt thereof and at least one base is especially useful for polishing surfaces, including those used in microelectronics.

pH-buffered slurry and use thereof for polishing

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Burlington, VT, United States of America

Mark P Murray