Kla Tencor Corporation

Kla Corporation

Mark Lin

Ye Yang

John F Heanue

Joseph A Heanue

Edward Gerald Solomon

Paul F Petric

Alexander Jozef Gubbens

David Aitan Soltz

Edward Michael James

Ben Clarke

M Nasser Ghodsi

Laurence S Horndon

A gripper assembly is disclosed. The gripper assembly includes a stage, a mounting platform, and a plurality of the flexible gripper elements. The flexible gripper element is configured to grip an object. The flexible gripper elements are supported by a first end piece, where the first end piece is attached to the mounting platform. The mounting platform is connected to the stage, where the stage is moveable. The flexible gripper element includes a hollow section that is selectively pressurizable. The hollow section includes one or more zones, where each zone includes chambers which are pressurizable by a fluid input. The selective pressurization of the hollow section allows the flexible gripper element to grip the object.

Soft gripper with multizone control to allow individual joint articulation

An electron beam apparatus is configured for dark field imaging of a substrate surface. Dark field is defined as an operational mode where the image contrast is sensitive to topographical features on the surface. A source generates a primary electron beam, and scan deflectors are configured to deflect the primary electron beam so as to scan the primary electron beam over the substrate surface whereby secondary and/or backscattered electrons are emitted from the substrate surface, said emitted electrons forming a scattered electron beam. A beam separator is configured to separate the scattered electron beam from the primary electron beam. The apparatus includes a cooperative arrangement which includes at least a ring-like element, a first grid, and a second grid. The ring-like element and the first and second grids each comprises conductive material. A segmented detector assembly is positioned to receive the scattered electron beam after the scattered electron beam passes through the cooperative arrangement. Other embodiments, aspects and features are also disclosed. The apparatus is configured to yield good topographical contrast, high signal to noise ratio, and to accommodate a variety of scattered beam properties that result from different primary beam and scan geometry settings.

Apparatus and method for obtaining topographical dark-field images in a scanning electron microscope

A signal conduction channel having a first element that receives electrons at a first end from a vacuum environment, produces photons as the electrons are received, and propagates the photons along a length of the first element to a distal second end, and a second element that receives the photons from the second end of the first element, converts the photons to electrons, and multiplies the electrons, where no additional element is disposed between the second end of the first element and the second element, except optionally at least one of a photon-conductive epoxy, a lens, and an optical coupling plate that touches both the second end of the first element and the second element.

Integrated segmented scintillation detector

Growing community of inventors

San Jose, CA, United States of America

Mark Lin