California Institute of Technology

Mark L Adams

Axel Scherer

Stephen R Quake

Marc Alexander Unger

Hou-Pu Chou

Todd A Thorsen

Carl L Hansen

Markus M Enzelberger

Jian Liu

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Microfabricated elastomeric valve and pump systems

Techniques for integrating optoelectronic system and microfluidic system. An apparatus for optical analysis includes a detector system and a microfluidic system on the detector system. The apparatus is free from any lens system between the microfluidic system and the detector system. Methods of making such an apparatus and using such an apparatus are also disclosed.

Optoelectronic and microfluidic integration for miniaturized spectroscopic devices

A miniaturized fluidic spectrometer comprises a light source, a fluidic circuit having a plurality of flow channels through which an analyte flows, and a proximity detector array for detecting light from the light source transmitted through the fluidic circuit. Where the light source is broadband, a variable filter is disposed between the detector array and the fluidic circuit so that each position of the detector array is provided with a different wavelength response. The fluidic circuit is disposed in an optimized Fabry-Perot etalon. The fluidic circuit is defined in an elastomeric material and includes means for tuning the Fabry-Perot etalon by pressurization of flow channels in the elastomeric material.

Method and apparatus for CMOS imagers and spectroscopy

Method of forming a via in a microfabricated elastomer structure

According to the invention semiconductor processing procedures can be applied to silicone elastomeric materials. The surface tension of the elastomeric material is changed by depositing a thin layer of silicon, silicon nitride, silicon dioxide or a combination thereof onto the elastomer's exposed surface. In the illustrated embodiment it is shown that it is possible to deposit a thin layer of silicon dioxide onto the elastomer's exposed surface through re*active sputter deposition of silicon dioxide within an argon-oxygen plasma. In another plasma fabrication procedure, the elastomer material is directionally etched using a standard RF plasma etching system and a dry chemical oxygen-Freon removal procedure, which procedure volatilizes all of the components of the polydimethylsilicone (PDMS) or GE's RTV elastomer material.

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Pasadena, CA, United States of America

Mark L Adams