Edwards Vacuum LLC

Edwards Limited

Mark Kollin Romeo

David Wren Dupre

Budd Edward Faulkner

Gerald Robin Shelley

Peter George Stammers

Gregory Ryan Le Mon

Jacob Henry Goeke

Matthew Demian Klepp

Craig Richard Charles Turner

Brent Haslett

Nicholas Daniel Hutton

Jeffrey Robert Schwab

Calvin Michael Cox

Brett Trevor Lawrence

Clamp

The present disclosure relates to an abatement apparatus monitoring system. The abatement apparatus monitoring system includes a processor; and at least one load cell for outputting a load cell signal to the processor. The at least one load cell is configured to support a waste tank of an abatement apparatus. The processor is configured to monitor a level of a liquid in the waste tank in dependence on the load cell signal. The present disclosure also relates to an abatement system comprising an abatement apparatus monitoring system; and a method of monitoring operation of an abatement system.

Monitoring system and method

A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value Rfor the group of electric heaters, compare the resistance value Rwith a reference resistance value Rand judge a fault condition if the resistance value Rdiffers from the reference resistance value Rby more than a predetermined amount.

Detecting heater failure in a group of electric heaters in a process equipment heating system

An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.

Apparatus and method for tuning pump speed

Growing community of inventors

North Plains, OR, United States of America

Mark Kollin Romeo