Mks Instruments, Inc.

Mark James Quaratiello

Michael L'Bassi

Junhua Ding

Kaveh H Zarkar

Ronald H Bouley

A gas delivery system and associated method includes a flow channel, a control valve, a downstream pressure sensor, and a controller. The control valve controls flow of gas in the flow channel. The downstream pressure sensor, located downstream of the control valve, measures gas pressure in the flow channel. The controller has an external trigger input to receive a trigger signal applied to a shutoff valve downstream from the control valve. The controller operates in separate modes based on a state of the trigger signal. In a non-triggered mode, the controller controls pressure at the pressure sensor via the control valve in accordance with a first gain schedule. In the triggered mode, the controller controls the pressure at the pressure sensor via the control valve in accordance with a second gain schedule that is distinct from the first gain schedule.

Pressure control using an external trigger

A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.

Method and apparatus for pulse gas delivery using an external pressure trigger

A system for and method of compensating for attitude sensitivity of at least two thermal sensor coils mounted on a tube through which a fluid flows along a common axis of flow for use in generating a flow measurement signal representative of the flow of fluid through the tube is disclosed. One of the coils is adapted in provide thermal energy to the fluid flowing through the tube at an upstream location so as to establish and measure the upstream temperature of the fluid at the upstream location, and one of the coils is adapted to measure the downstream temperature of the fluid at a downstream location. The flow measurement signal is a function of the difference between the measured upstream and downstream temperatures. The system includes structure for, and the method includes the steps of measuring the force of gravity in the direction of the common axis; and modifying the flow measurement signal as a function of the measured force of gravity.

Attitude error self-correction for thermal sensors of mass flow meters and controllers

A system and method for in-situ verification and calibration of flow control devices includes a first network physical layer connecting the flow control devices to a flow verification device. A controller of the flow verification device is programmed to communicate with each of the flow control devices through the first network physical layer, receive gas specific information and a transfer function from each of the flow control devices, and verify the flow of each flow control device. The controller of the flow verification device is further programmed to communicate with each of the flow control devices through the first network physical layer and, if necessary, calibrate the flow control devices. The verification and calibration of the flow control devices is preferably carried out based upon a single command provided through a tool controller connected to a second network physical layer connected to the flow control devices.

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Atkinson, NH, United States of America

Mark James Quaratiello