Honeywell International Inc.

Mark J Jarrett

Edgar Robert Mallison

Steven P Ecklund

Lisa P Koland

Methods and apparatus are provided for detecting leaks in a MEMS sensor package, and in particular, a MEMS sensor package that includes an oscillating structure or element that has a Quality (Q) value. The method and apparatus may include measuring the Q value of the MEMS sensor at a first time, applying a pressure to the outside of the MEMS sensor package, and measuring the Q value of the MEMS sensor at a second time after pressure has been applied for a period of time. A change in the measured Q values between the first time and the second time may be determined, which may then be correlated to a leak rate for the particular MEMS sensor package. In some cases, a leak rate of 2&#xd7;10He atm.cc/s or less may be detected.

MEMS sensor package leak test

A method for reducing oxidation of indium seals within a substantially sealed housing is disclosed. The method includes installing a getter within the housing, the getter including a getter material to reduce oxygen and water vapor levels within the housing, reducing oxygen and water vapor levels within the housing relative to ambient air, substantially sealing the housing, and activating the getter within the housing.

Methods and apparatus for removing gases from enclosures

A manifold for providing the simultaneous processing of a plurality of laser block assemblies. In one embodiment, the manifold includes a hollow passage formed along the length of the manifold, and a plurality of passages extending between the hollow chamber and the exterior of the manifold. A laser block assembly is mounted to each of the plurality of passages of manifold. The assemblies can be arranged in a flat or parallel spaced arrangement relative to each other, and are mounted to the manifold with a fitting that is adapted to be easily severed after processing of the assemblies is completed. The manifold is mounted to a station of a processing tool, and a plurality of processing applications are performed on the plurality of laser block assemblies in a simultaneous fashion.

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Lake Elmo, MN, United States of America

Mark J Jarrett