International Business Machines Corporation

Mark J Flemming

Karl V Swanke

John Maxwell Cohn

John Chester Malinowski

Alexander Joseph Franz

Matthew S Turnbull

Tyler D Kieft

Matthew Walker

Raghav Kohli

Methods for tracking the identity of die after singulation from a wafer. The product chips and die include a pattern of features formed in a metallization level of a back-end-of-line (BEOL) wiring structure. The features in the pattern contain information relating to the die, such as a unique identifier that includes a wafer identification used to fabricate the die and a product chip location for the die on a wafer. The features may be imaged with the assistance of a beam of electromagnetic radiation that penetrates into a packaged die and is altered by the presence of the features in a way that promotes imaging.

Methods for reading a feature pattern from a packaged die

Product chips and die that include a pattern of features formed in a metallization level of a back-end-of-line (BEOL) wiring structure. The features in the pattern contain information relating to the die, such as a unique identifier that includes a wafer identification used to fabricate the die and a product chip location for the die on a wafer. The features may be imaged with the assistance of a beam of electromagnetic radiation that penetrates into a packaged die and is altered by the presence of the features in a way that promotes imaging.

Product chips and die with a feature pattern that contains information relating to the product chip

A tool and method is provided to graphically correlate process and test data with specific chips on a multi-project wafer. The tool and method is configured and implemented to select certain sites and export these sites to an industry standard map that can be used in a variety of chip picking or test tools. In one embodiment, the method includes importing a wafer floor plan with chips of different design parameters and importing manufacturing logistical information of the chips. The method further includes graphically rendering each chip on the wafer to scale within a unit cell using the imported wafer floor plan and the manufacturing logistical information.

Tool and method to graphically correlate process and test data with specific chips on a wafer

Product chips and die, methods for fabricating product chips, and methods for tracking the identity of die after singulation from a wafer. The product chips and die include a pattern of features formed in a metallization level of a back-end-of-line (BEOL) wiring structure. The features in the pattern contain information relating to the die, such as a unique identifier that includes a wafer identification for a wafer used to fabricate the die and a product chip location for the die on the wafer. The features may be imaged with the assistance of a beam of electromagnetic radiation that penetrates into a packaged die and is altered by the presence of the features in a way that promotes imaging.

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Essex Junction, VT, United States of America

Mark J Flemming