Brooks Automation Gmbh

Mark Ives

Martin Hosek

Christopher A Hofmeister

Robert T Caveney

Jairo Terra Moura

Matthew W Coady

Roumen Botev

Stuart Beale

Victor J Theriault

A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.

Scalable motion control system

A load lock and related method of handling a substrate involves placing a substrate onto a vertically movable poppet and moving the poppet between two vertically opposed subchambers such that in moving the poppet toward one of the subchambers, that subchamber is sealed to atmosphere. The two subchamber system allows one substrate to be placed into a buffer and another substrate to be cooled at the same time. Also, the system allows for a slow vacuum to be made on the substrate in a subchamber to avoid undesirably loading the substrate by the otherwise immediate drop in pressure.

Single substrate load lock with offset cool module and buffer chamber

A dual plate gas assisted heater module having a vertically movable poppet movable between an upper and a lower subchamber has a passive heating feature which preheats a substrate prior to introducing it into a subchamber for active heating.

Dual plate gas assisted heater module

Growing community of inventors

Merrimack, NH, United States of America

Mark Ives