Air Products and Chemicals, Inc.

Mark Ian Sistern

Andrew David Johnson

John B Dickenson

Peter James Maroulis

Steven Arthur Rogers

Martin Jay Plishka

A process for removing organic electroluminescent residues from a substrate is described herein. The process includes the steps of providing a process gas comprising a fluorine-containing gas, optionally an oxygen-containing gas, and optionally an additive gas; activating the process gas in a remote chamber using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the organic electroluminescent residue from the surface.

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Audlem, United Kingdom

Mark Ian Sistern