Tel Fsi, Inc.

Tfl Fsi, Inc.

Mark Goluch

Edward Hanzlik

Robert E Larson

Gregory Paul Thomes

David C Zimmerman

Christina Ann Rathman

An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.

Apparatus and method for scanning an object through a fluid stream

Apparatus and method for scanning an object through a fluid spray

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St. Louis Park, MN, United States of America

Mark Goluch