Fei Comapny

Mark Emerson

Marcus Straw

Milos Toth

Libor Novak

Marek Uncovsky

Martin Cafourek

William N Parker

A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.

Method for coincident alignment of a laser beam and a charged particle beam

An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photoelectron yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.

Environmental cell for charged particle beam system

Automated method for coincident alignment of a laser beam and a charged particle beam

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Pullman, WA, United States of America

Mark Emerson