Illinois Tool Works Inc.

Mark E Hogsett

Steven Bernard Heymann

Lyle Dwight Nelsen

Carl Newberg

Systems and methods for sterilization using nonthermal plasma (NTP) ionization are disclosed. An example method for inactivation of viable microorganisms includes: inactivating viable microorganisms in a predetermined volume by: installing a plurality of ceiling mounted direct current (DC) or alternating current (AC), bipolar or steady-state, ion emitter modules based on a geometry of the predetermined volume; and producing, using the plurality of ceiling mounted ion emitter modules, a DC or AC, bipolar or steady-state, nonthermal plasma (NTP), each of the ceiling mounted ion emitter modules comprising a high voltage power supply (HVPS).

Systems and methods for sterilization using nonthermal plasma generation

An embodiment of the invention provides an apparatus for detecting electrostatic discharges (ESD) events, comprising: an ESD detector configured to determine at least one process window that will permit the ESD detector to detect an ESD event; at least one antenna coupled to said ESD detector; and said ESD detector calibrated for at least one discharge energy. Another embodiment of the invention provides: a method for detecting electrostatic discharges (ESD) events, comprising: determining at least one process window that will permit an ESD detector to detect an ESD event; and calibrating the ESD detector for at least one discharge energy.

In-tool ESD events selective monitoring method and apparatus

In one embodiment of the invention, an apparatus for electrostatic discharges (ESD) events monitoring incorporating a charged device model event simulator (CDMES) unit comprises: at least one antenna positioned in a process area; an ESD detector coupled to said at least one antenna; said ESD detector wirelessly coupled to said CDMES unit; and said ESD detector calibrated for different discharge energies generated by said CDMES unit.

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Tiburon, CA, United States of America

Mark E Hogsett