Hitachi Global Storage Technologies Netherlands B.v.

Mark Clinton Thurber

Michael William Chaw

Bruno Michel

Ashok Lahiri

Alexander Bietsch

James L Hedrick

Robert Dennis Miller

Craig Jon Hawker

Willi Volksen

Phillip Joe Brock

Teddie Peregrino Magbitang

Dennis R McKean

Richard H Koch

Ian Robson McFadyen

Richard I Palmisano

Jila Tabib

Wesley LeRoy Hillman

Dan Dawson

Karl Frank Beckle

Bruno Alejandro Valdes

A mechanically releasable slider process utilizes silicone rubber or PDMS to take the function of a planarization material for individual sliders or slider rows. Mechanical debonding takes advantage of the rubber-elastic property of PDMS. A gripper is used in a virtually solvent-free, air bearing patterning UV-molding process and resist-based processes. A PDMS-based fixture is used during both the lapping process and the photo or UV-mold patterning of the ABS surface. This fixture can mechanically hold sliders by large area reversible adhesion while allowing gimbaling, electrical connection, actuation, UV-molding or photolithography, and mechanical release, thus reducing the number of slider manipulations to two.

System, method, and apparatus for mechanically releasable slider processing including lapping, air bearing patterning, and debonding

UV molding from elastomeric masters on thin bendable backplanes that allow replication of UV-cured resist patterns with high accuracy is disclosed. This design accommodates large substrate topographies, has improved de-molding properties, and facilitates two-in-one lithography and assembly of the sliders on topographically structured elastomeric sticky pads. The combination of sticky pad assembly and two-in-one lithography allows an all-in-one harmony process based on UV-molding. These features cure prior art technical problems of the harmony process while significantly reducing cost.

System, method, and apparatus for multilevel UV molding lithography for air bearing surface patterning

A process for fabricating sliders where the sliders are held in place during processing by a solid matrix material is described. A thin coating of a release-layer material is applied on the sliders before encapsulation in the matrix material. The release-layer material is polyvinyl alcohol and more preferably high molecular weight polyvinyl alcohol which is highly hydrolyzed. Use of the release-layer of the invention maintains the process resistance while providing the advantage of allowing easier removal of the matrix material after it is no longer needed. The release-layer can be applied to encapsulant materials including epoxies, acrylates, polyimides, silsesquioxanes and others. After the selected fabrication process such as the formation of air-bearing features an appropriate solvent is applied to soften the polyvinyl alcohol film and allow clean debonding of the sliders.

Slider processing system utilizing polyvinyl alcohol release layer

A system and method for burnishing the edges and corners of hard disk drive sliders uses a combination of flexible tape fixturing and mechanical protrusions located beneath the tape to systematically orient selected slider corners and edges to be exposed to an abrasive in a flexible manner. This solution carefully exposes the sliders even when there is very little clearance between the sliders. A variety of different rounding geometries are achieved by customizing the protrusions underneath the flexible tape. Multiple slider corners and/or edges are exposed to the abrasive at one time for bulk processing. The sliders are oriented in such a way that sensitive structures located on the air bearing surfaces of the sliders are not harmed during burnishing.

System and method for rounding disk drive slider corners and/or edges using a flexible slider fixture, an abrasive element, and support elements to control slider orientation

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San Jose, CA, United States of America

Mark Clinton Thurber