Texas Instruments Corporation

Mark Christopher Fisher

Simon Joshua Jacobs

William Robert Morrison

Murali Hanabe

Ganapathy Sivakumar

A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n&#x2267;2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.

Coatings for relatively movable surfaces

A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CFO), wherein M is a polar head group and wherein n&#x2267;2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.

Growing community of inventors

Farmersville, TX, United States of America

Mark Christopher Fisher