Other

Cymer, Inc.

Mark Branham

William N Partlo

Igor Vladimirovich Fomenkov

Richard L Sandstrom

Richard M Ness

Richard C Ujazdowski

John Martin Algots

Scott T Smith

Thomas D Steiger

Paul C Melcher

Stuart L Anderson

Raymond F Cybulski

Gamaralalage G Padmabandu

Curtis L Rettig

Robert A Shannon

Ronald L Spangler

Alex P Ivaschenko

Shahryar Rokni

Paolo Zambon

Robert B Saethre

David M Johns

Christian J Wittak

Clay C Titus

Jerome A Emilo

Sunjay Phatak

A piezoelectric quartz plate having reduced frequency deviation as a function of temperature, wherein the quartz plate is cut at an angle described by: where quartz plate thickness is chosen in accordance with a desired frequency. This useful behavior can be manipulated such that a quartz plate is designed to counteract frequency shifts over temperature excursion of other electrical components found in typical oscillator circuits. The choice of angles of cut having larger margins of error means that quartz oscillators can be more easily reproduced on a large scale and at a lower cost than has traditionally been the case.

Piezoelectric quartz plate and method of cutting same

The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.

Four KHz gas discharge laser system

Growing community of inventors

Fallbrook, CA, United States of America

Mark Branham