Wolfson Microelectronics Limited

Avanex Corporation

Mark Begbie

Richard Ian Laming

Anthony Traynor

Jean Podlecki

Geradus Johannes Burger

Paul Blair

A micro-electrical-mechanical device comprises: a transducer arrangement having at least a membrane being mounted with respect to a substrate; and electrical interface means for relating electrical signals to movement of the membrane; in which the transducer arrangement comprises stress alleviating formations which at least partially decouple the membrane from expansion or contraction of the substrate.

MEMS device

A MEMS device comprising a flexible membrane that is free to move in response to pressure differences generated by sound waves. A first electrode mechanically coupled to the flexible membrane, and together form a first capacitive plate. A second electrode mechanically coupled to a generally rigid structural layer or back-plate, which together form a second capacitive plate. A back-volume is provided below the membrane. A first cavity located directly below the membrane. Interposed between the first and second electrodes is a second cavity. A plurality of bleed holes connected the first cavity and the second cavity. Acoustic holes are arranged in the back-plate so as to allow free movement of air molecules, such that the sound waves can enter the second cavity. The first and second cavities in association with the back-volume allow the membrane to move in response to the sound waves entering via the acoustic holes in the back-plate.

MEMS process and device

A MEMS device comprising a flexible membrane that is free to move in response to pressure differences generated by sound waves. A first electrode mechanically coupled to the flexible membrane, and together form a first capacitive plate. A second electrode mechanically coupled to a generally rigid structural layer or back-plate, which together form a second capacitive plate. A back-volume is provided below the membrane. A first cavity located directly below the membrane. Interposed between the first and second electrodes is a second cavity. A plurality of bleed holes connect the first cavity and the second cavity. Acoustic holes are arranged in the back-plate so as to allow free movement of air molecules, such that the sound waves can enter the second cavity. The first and second cavities in association with the back-volume allow the membrane to move in response to the sound waves entering via the acoustic holes in the back-plate.

A hybrid optical component is described incorporating a planar lightguide circuit (PLC) chiphaving at least two waveguides provided thereon which are separated by a trench, and a MEMS chipattached to the PLC chip and incorporating a MEMS element displaceable relative to the trench so as to control the passage of an optical signal between the two waveguides. A capis sealingly engaged with the PLC chipto form a housing therewith which houses said MEMS chiphermetically therein. The component may act as a variable optical attenuator (VOA) device in which a MEMS shutter attenuates an optical signal passing between two waveguides, or may be an optical switch in which a MEMS mirror is used to switch an optical signal from a first waveguide between at least two other waveguides which intersect with the first waveguide at the trench.

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Edinburgh, United Kingdom

Mark Begbie