Corning Incorporated

Mark Alex Shalkey

Michael John Moore

Raymond Charles Cady

Mark Andrew Stocker

Thomas William Brew

Paul John Shustack

Yawei Sun

Douglas Edward Brackley

Kiat Chyai Kang

Paul Maynard Schermerhorn

Samir Khanna

W Neil Peters

James Frederick Avery

Methods and apparatus for forming a semi-spherical polishing pad for polishing semiconductor surfaces, provide for: placing a polishing pad pre-form on a dome-shaped forming surface, the polishing pad pre-form including a circular body having a center and an outer peripheral edge, and a plurality of slots extending from the outer peripheral edge towards the center; disposing a bladder opposite to the dome-shaped forming surface and the polishing pad pre-form; inflating the bladder with a fluid such that the dome-shaped forming surface of the bonnet form presses against the polishing pad pre-form from one side and the bladder presses against the polishing pad pre-form from an opposite side; and maintaining the pressing step for a predetermined period of time to achieve the semi-spherical polishing pad.

Polishing pad for polishing semiconductor surfaces

Methods and apparatus for forming a slurry polishing pad

Systems, methods, and apparatus relate to a glass reference plate panel; to a modular glass reference plate assembly; and to creation of the modular glass reference plate assembly, which may include providing a plurality of glass reference plate panels, arranging the plurality of glass reference plate panels into an array of adjoining glass reference plate panels, and adhering together the adjoining glass reference plate panels. One or more embodiments may include 6.8 mm-thick borosilicate glass, ground, and polished, with reference marks on a top side and a PVD aluminum coating on a bottom side, perforated with holes, arranged in a 4&#xd7;4 array of 16 glass reference plate panels, each approximately 810 mmin size, abutting at interfaces formed by lap joints, and bonded together with a UV-curable adhesive into a contiguous piece.

Modular glass reference plate assembly

Apparatus for forming a slurry polishing pad

Apparatus and a method for selectively vapor-coating an extrusion die to extrude honeycombs with desired distributions of web thicknesses, wherein at least one perforated impedance or preferential coating plate with a desired pattern of holes is positioned adjacent to, but spaced apart from, a face of the extrusion die to be coated, whereby a coating gas passed through the coating plate and into the die imparts a desired coating distribution to the extrusion die slots that is effective to closely control the web thickness distribution in honeycombs extruded therefrom.

Extrusion die coating method

A method is provided for manufacturing a thin-walled honeycomb ceramic substrate by extruding a plasticized ceramic batch material through a filter screen having wedge shaped filter wires to remove foreign particulate and agglomerated batch material. The filter wires are supported by a set of support wires attached substantially perpendicular to the filter wires. The support wires are may also be advantageously wedge shaped. The filter screen of the present invention may have a wear resistant layer at the surface of the screen, typically a boride or a nitride. The wear resistant coating may also be a nickel-based coating.

Method and apparatus for extruding a ceramic material

A honeycomb extrusion die comprising a die body incorporating an inlet face, a discharge face opposite the inlet face, a plurality of feedholes extending from the inlet face into the body, and an array of intersecting discharge slots extending into the body from the discharge face and interconnecting with the feed holes, the intersecting discharge slots being formed by the side surfaces of a plurality of pins bounded by the slots and extending into the die body from the discharge face, wherein a plurality of the pins include one or more multi-textured side surfaces, each side surface including at least two surface regions differing in surface finish from each other.

Modified slot extrusion dies

A honeycomb extrusion die comprising a die body incorporating an inlet face, a discharge face opposite the inlet face, a plurality of feedholes extending from the inlet face into the body, and an intersecting array of discharge slots extending into the body from the discharge face to connect with the feed holes, the intersecting array of discharge slots being formed by the side surfaces of a plurality of pins bounded by the slots and extending into the die body from the discharge face, wherein at least some of the side surfaces of the pins incorporate at least one geometrically designed flow-modifying surface discontinuity.

Growing community of inventors

Corning, NY, United States of America

Mark Alex Shalkey