Tokyo Electron Limited

Voyan Technology

Mark Alan Erickson

Sunil C Shah

Thorkell Gudmundsson

Ioannis Kanellakopoulos

Cecilia Gabriela Galarza

Pradeep Pandey

Michail Konstantinos Tsatsanis

Dan Hernandez

James W Waite

Daniel Joseph Hernandez

John Josef Hench

Ming Gu

Norman Man Leung Yuen

Thomas E Par&eacute;, Jr

Wenling Wang

Gurcan Aral

Stephen P Boyd

Fujio Suzuki

Koichi Sakamoto

Johan D Overby

Moyuru Yasuhara

Kun Li

Thomas E Paré, Jr

Di Lin

Fernando Lopez-de-Victoria

Heberly Rosario

Tom Pare

Signals in a multi-channel, impaired communication system are post-processed at the receiver. A triangular matrix Decision Feedback Demodulator (DFD) at the receiver extracts channels without requiring delivery of receiver parameters to the transmitter. Multi-Input Multi-Output (MIMO) processing matrices and DFD parameters are computed by first applying matrix transformations to diagonalize the noise covariance matrix of the multiple channels received at the receiver. QR decompositions (i.e., decompositions into orthogonal and triangular matrices) are then applied to the main channels to obtain triangular channel matrices. The noise-diagonalizing transformations and QR decompositions are then combined to form the MIMO postprocessing matrices and DFD parameters. MIMO postprocessing matrices and DFD parameters are computed from training data and then adapted during live data transmission.

Mitigation of interference and crosstalk in communications systems

A method and system are disclosed for improving the performance of a multiline transmission system by using one or more split-pair receivers in a multiline communications system to identify crosstalk on a pair of transceivers coupled to the split pair receivers, wherein each split pair receiver receives a signal including the crosstalk from each transceiver and provides a corresponding signal vector to a post processing unit, and performing MIMO post-processing on signal vectors received at a receiver from each transceiver and each split-pair receiver while minimizing crosstalk on pairs of lines in the multiline communications system with a frequency equalizer.

Method and system for split-pair reception in twisted-pair communication systems

A method and system for providing window shaping for multiline transmission in a communications system are described. A last portion of a prefix symbol is extracted. A prefix with a prefix window is shaped to create a shaped prefix. A DMT symbol is shaped with a DMT window to create a shaped DMT symbol. The shaped DMT symbol is combined with the shaped prefix.

Method and system for providing window shaping for multiline transmission in a communications system

A method and system for multiline transmission in communications systems are described. A transmitter () performs MIMO pre-processing () on symbol vectors. A signal vector associated with the symbol vector is transmitted. A receiver () performs MIMO post-processing () on the received signal vectors to minimize the effects of crosstalk on pairs of lines in the multiline communications system.

Multiline transmission in communication systems

A method and system are disclosed for creating dynamic models of etch processes in semiconductor manufacturing. In one embodiment, a method comprises modeling an etch process used in semiconductor manufacturing to generate a dynamic process model. The dynamic process model is used to determine input values that result in a desired output value. A process recipe is optimized for the etch process with the input values.

Method and system for dynamic modeling and recipe optimization of semiconductor etch processes

A method that sends upstream a collection of data samples measured from a DSL line.

Method and apparatus for cooperative diagnosis of impairments and mitigation of disturbers in communication systems

A method and apparatus for identification of interference sources are disclosed.

Method and apparatus for characterization of disturbers in communication systems

A method for automated system identification of a linear system is disclosed. A model structure is selected and one or more reference signal values are generated for input into the system. Input signal values and output signal values are retrieved from the system and system identification is performed on the model structure using the input signal values, the output signal values, and the one or more reference signal values. A point model, obtained as a result of the system identification, is then verified for accuracy.

Method for automated system identification

A system and method is given for minimizing periodic disturbances in electronic systems. Given the input-output characteristics of the system, the present method identifies and cancels the periodic disturbance. The periodic disturbance parameters are identified through the use of a residual generator. The output of the residual generator is fed into an identifier that estimates disturbance parameters. The compensation filter combines the output of the identifier with a set of pre-computed parameters to form a cancellation signal. This signal is then added to the input of the plant to cancel the periodic disturbance.

Efficient adaptive feedforward periodic disturbance compensation

An apparatus for computer-aided design of a product or process is described. The apparatus includes a template module for storing a plurality of tasks and a plurality of rules for designing the product. The apparatus further includes a processing module coupled to the template module and being configured by the plurality of rules, for executing the plurality of tasks.

Apparatus for computer-aided design of a product or process

The present invention includes a method and system for compensating for cross-talk interference in communication systems. The method includes estimation of the interfering signals. Further, the method includes performing a compensation operation on at least one interfering signal.

Method and apparatus for mitigation of disturbers in communication systems

A heat treatment apparatus for making a heat treatment while estimating temperatures of objects-to-be-processed that can estimate correct temperatures of the objects-to-be-processed. A reaction tube includes heaters and temperature sensors, and receives a wafer boat. A controller estimates temperatures of wafers and temperatures of the temperature sensors in zones in the reaction tube corresponding to the heaters by using the temperature sensors and electric powers of the heaters. Based on relationships between estimated temperatures of the temperature sensors and really metered temperatures, functions expressing the relationships between the estimated temperatures and the really metered temperatures are given for the respective zones. The functions are substituted by the estimated wafer temperatures to correct the estimated wafer temperatures. Electric powers to be fed to the respective heaters are respectively controlled so that the corrected wafer temperatures are converged to target temperature trajectories.

Batch-type heat treatment apparatus and control method for the batch-type heat treatment apparatus

A method and system for joint spindle speed and head position control in rotating media storage systems are described. A controller changes the rotation speed of a spindle assembly based upon the position information of a desired data sector. This controller may also control the actuator assembly based upon the position information of the desired data sector.

Joint spindle speed and head position control in rotating media storage systems

The present invention includes a method and system for limiting the ramp rate of a variable under control in order to control stress in a process or plant under control. The present invention takes a limit curve provided by the user and combines that limit curve with a scale factor curve obtained from a model of the system to produce an allowable limit curve. A ramp rate limiter then uses the allowable limit curve to control the ramp rate of the variable under control such that the ramp rate of the variable under control is able to achieve the maximum allowable limit but no more.

Ramp rate limiter to control stress during ramping

A method and system is disclosed for design and implementation of fixed-point filters from floating-point filters. A design sequence for designing a fixed-point filter for a system is selected. A low-order floating-point filter and a first set of parameters associated with the low-order floating-point filter components are then selected. One or more parameters of the first set of parameters is then iteratively modified to obtain a set of modified parameters, until a plurality of performance characteristics calculated using the first set of parameters meets a performance objective for the fixed-point filter for the system.

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Sacramento, CA, United States of America

Mark Alan Erickson