Dow Corning Corporation

Mark A Wanous

Wei Zhu Chen

Binh Thanh Nguyen

Eric S Moyer

Xiaobing Zhou

Sheng Wang

A polysilane-polysilazane copolymer contains a polysilane unit of formula (I), and a polysilazane unit of formula (II), where each Rand each Rare each independently selected from H, Si, and N atoms, Ris selected from H, Si, or C atoms, a&#x2267;1, b&#x2267;1, and a quantity (a+b)&#x2267;2. The polysilane-polysilazane copolymer may be formulated in a composition with a solvent. The polysilane-polysilazane copolymer may be used in PMD and STI applications for trench filling, where the trenches have widths of 100 nm or less and aspect ratios of at least (6). The polysilane-polysilazane copolymer can be prepared by amination of a perchloro polysilane having (2) or more silicon atoms per molecule with a primary amine. 

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Midland, MI, United States of America

Mark A Wanous