Rockwell Automation Technologies Incorporated

Allen-bradley Company, LLC

Rockwell Technologies, Inc.

Mark A Lucak

Robert J Kretschmann

Richard D Harris

Michael J Knieser

Jonathan R Engdahl

David J Gee

Patrick C Herbert

Frederick Michael Discenzo

Robert J Pond

Louis F Szabo

Michael T Klein

Shawn L Adams

Timothy Siorek

Jeffrey R Annis

Ira B Goldberg

Ernst H Dummermuth

Elik I Fooks

Steven Martin Galecki

Jonathan D Bradford

Charles S Hollingsworth

Lawrence W Esker

Donald S Pieronek

Jonathon R Engdahl

Hassan A Chami

Michael A Bush

A method for fabricating an electrically isolated MEMS device having an outer stationary MEMS element and an inner movable MEMS element is provided that does not use a sacrificial layer. Rather, a pair of spacers are defined on the outer portions of the upper surface of a conductive wafer, and an insulating material is deposited thereon. The spacers are attached to a substrate to define an internal void therein. The wafer is then patterned to form the outer MEMS element as well as a conductive member for the inner MEMS element, separated from the outer MEMS element by a gap. A portion of the insulating layer that is disposed in the gap is then removed, thereby releasing the inner MEMS element from the stationary MEMS element.

Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void

A microelectromechanical system (MEMS) device is used to transfer power from a source generator to a power generator that delivers electrical power to a load, while maintaining electrical isolation between the source generator and power generator for size critical applications where transformers or coupling capacitors would not be practical, but where electrical isolation is desired.

Microelectromechanical isolating power converter

A microelectromechanical system (MEMS) strain gauge includes at least one flexible arm that can be caused to oscillate. Transverse strain on the arm changes the resonant frequency of the arm. A detector communicating with the flexible arm may detect the frequency of oscillation to provide, an indication of the transverse strain of the substrate.

Microelectromechanical strain gauge with frequency detector

Microelectromechanical (MEMS) switches are used to implement a flying capacitor circuit transferring of electrical power while preserving electrical isolation for size critical applications where transformers or coupling capacitors would not be practical. In one embodiment, the invention may be used to provide input circuits that present a programmable input impedance. The circuit may be modified to provide for power regulation.

Microelectromechanical isolating circuit

A method for fabricating MEMS structure includes etching a recess in an upper surface of a substrate that is bonded to a wafer that ultimately forms the MEMS structure. Accordingly, once the etching processes of the wafer are completed, the recess facilitates the release of an internal movable structure within the fabricated MEMS structure without the use of a separate sacrificial material.

Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate

A MEMS structure is provided having a cap that encapsulates and protects the fragile components of the device, while having an electrical trace embedded in a nonconductive substrate. The electrical trace includes a first terminal end that is exposed to the peripheral region of the device, and a second end that is connected to the MEMS structure to facilitate operation of the device.

Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap

A method for fabricating an electrically isolated MEMS device is provided that uses surface fabrication techniques to form a conductive stationary MEMS element, and a movable MEMS element spaced apart from the conductive stationary MEMS element. The movable element includes a nonconductive base which provides for electrical isolation between a plurality of conductive members extending from the base. Modifications to the basic process permit the incorporation of a wafer-level cap which provides mechanical protection to the movable portions of the device.

Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques

An isolated-ADC and a method for providing isolated analog-to-digital conversion are disclosed. The isolated-ADC includes a microelectromechanical system (MEMS), a comparator, and a digital-to-analog converter (DAC). The MEMS includes a beam element supported from a substrate for movement with respect to an axis, first and second actuators and a sensor. The first and second actuators are capable of exerting respective forces upon the beam element causing the beam element to move in response to analog input and feedback signals, respectively. The sensor detects changes in position of the beam element and produces a position signal indicative thereof. The comparator generates a digital signal based upon a comparison of the position signal with a reference value. Based on the digital signal, the DAC generates the feedback signal, and the isolated-ADC produces a digital output signal.

MEMS-based electrically isolated analog-to-digital converter

A method is presented for fabricating an electrically isolated MEMS device having a conductive outer MEMS element, and an inner movable MEMS element spaced apart from the conductive outer MEMS element. The inner element includes a nonconductive base having a plurality of conductive structures extending therefrom. The conductive components are formed by plating a conductive material into a pre-formed mold which defines the shape of the conductor.

Method for fabricating an isolated microelectromechanical system device

High aspect ratio filaments of magnetic material are randomly dispersed in a non-magnetic matrix such as paper or plastic for part of a critical component of a manufactured product to permit remote sensing of the manufactured product by the application of an external oscillating magnetic field and the detection of the resulting induced magnetization. The material may be incorporated into a wide variety of products that must be remotely sensed.

Low cost material suitable for remote sensing

A digital communication network carries high and low priority data. The network stations that produce high priority data are assigned to a first group of stations and stations that produce low priority data are assigned to a second group with the two group not being mutually exclusive. Activity on the network is divided into periodic intervals of the same duration. Network control information, that defines how access to the medium, is determined is broadcast to all stations during a first segment of a periodic interval. The network control information defines the length of the periodic interval and of the periodic interval segments, and defines how many stations are in each group. Then during a second segment of the periodic interval, every station in the first group is afforded an opportunity, in a predefined order, to transmit high priority data over the medium. Stations in the second group are afforded an opportunity to transmit low priority data, when time remains after the first segment in a periodic interval before the network control information will be transmitted again. The specific station in the second group which is afforded an opportuinity to transmit first changes from periodic interval to periodic interval.

Method and apparatus for exchanging different classes of data during

Activity on a digital communication network is divided into periodic intervals and during a segment of each periodic interval a moderator station broadcasts a numerical count of the periodic intervals to all stations on the network. Each station has a memory in which a numerical value is stored, and a comparator that compares the numerical value to the numerical count received from the network. When the numerical count of the periodic intervals equals the numerical value, an apparatus within the station performs a defined operation, such as transmitting a message over the network or synchronizing a clock in the station to a master time standard. The equality of the periodic interval count and the numerical value also can be used to determine when to signal an external device. By using the count of the periodic intervals in this manner, the operation of several stations on the network can be coordinated.

Communication network with time coordinated station activity by time

A node circuit is operative to couple Manchester encoded data between a transmission medium and an associated electrical device. A first mechanism detects a message frame preamble having a pattern of alternating signal level of substantially identical duration, and a second mechanism that detects a start delimiter in the message frame. The start delimiter has a plurality of binary signal levels in a unique pattern that satisfies a defined set of criteria to optimize the probability that the pattern will be detected while minimizing the likelihood that random valid data will alias into the start delimiter pattern. A data decoder is provided to convert the Manchester encoded data into binary data which then is sent via a signal path to the associated electrical device. Another mechanism is included to detect a unique end delimiter that signals the termination of the message frame.

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Hudson, OH, United States of America

Mark A Lucak