Etec Systems, Inc.

Spynsite LLC

Applied Materials, Inc.

Robert T. and Virginia T. Jenkins

Robert T. and Virginia T. Jenkins As Trustees of the Jenkins Family Trust Dated Feb. 8, 2002

Robert T. Jenkins and Virginia T. Jenkins

Mark A Gesley

Richard E Crandall

Tim Williams

Romin Puri

Edlyn Teske

Marian Mankos

Andres Fernandez

Steven Thomas Coyle

Paul C Allen

Douglas Earl Holmgren

Jeffrey S Sullivan

Xiaolan Chen

Windsor Owens

Allan L Sagle

Daniel B DeBra

Glen E Howard

Brandon McPhail

David H Colby

Tim Thomas

In one embodiment, a method of machine learning and/or image processing for spectral object classification is described. In another embodiment, a device is described for using spectral object classification. Other embodiments are likewise described.

Machine learning and/or image processing for spectral object classification

Embodiments of a data encryption and/or decryption technique are disclosed. In accordance with one example embodiment, a method may include enciphering a message, based at least in part, on a hierarchical symbol assignment system, and modifying an enciphering key signal value to modify a level of security of enciphering.

Data enciphering or deciphering using a hierarchical assignment system

Embodiments of methods and/or systems for sorting digital information are disclosed. In one particular embodiment, samples of a portion of digital information are associated with prime numerals. Such digital information may then be sorted based upon combinations of such digital information. In another example embodiment, a portion or sub-portion of a collection of digital information is converted to at least one sorting value. It should be understood, however, that these are merely example implementations and that claimed subject matter is not limited in this respect.

Method and/or system for sorting digital signal information

Embodiments of a data encryption and/or decryption technique are disclosed. Briefly, for example, in accordance with one example embodiment a method is provided. A message based at least in part on a hierarchical symbol assignment system is encrypted. The hierarchical symbol assignment system is represented as a numerical value.

Embodiments of a method or a system for rendering images or spectral recognition are described.

System for image rendering or spectral recognition

A multiple electron beam pattern generator includes a multiple electron beam source to generate a plurality of electron beams that are modulated according to a pattern. An anode accelerates the electron beams, and then a beam retarding system generates a retarding electric potential about the electron beams to decrease the kinetic energy of the electron beams substantially near a substrate. A beam scanner scans the electron beams across the substrate. A substrate support supports the substrate, and a pattern is generated on the substrate.

Retarding electron beams in multiple electron beam pattern generation

An electron beam lithography system includes a laser for generating a laser beam, and a beam splitter for splitting the laser beam into a plurality of light beams. The intensity of the light beams is individually modulated. The light beams are of sufficient energy such that, when they impinge on a photocathode, electrons are emitted. Modulation of the light beams controls modulation of the resulting electron beams. The electron beams are provided to an electron column for focusing and scanning control. Finally, the electron beams are used to write a scanning surface, for example, using an interlaced writing strategy.

Multiple electron beam lithography system with multiple beam modulated laser illumination

Spurious electrodynamic effects are reduced or eliminated by the use of a mechanically compact, low capacitance, geometrically symmetric, differentially-driven blanker assembly. This eliminates the need for internal cables or SMA-type launchers and has a solid metal electromechanical contact to system ground.

Differential virtual ground beam blanker

An improved electron or ion gun support structure includes a hollow cylinder for rigidly connecting the source assembly to the source-motion ring, with the source cathode and associated lens extending into the hollow portion of the cylinder. The gun is thus made very stable and less susceptible to outside vibrations.

Mechanically stable field emission gun

The accuracy of a double-deflection beam blanker is dramatically improved for all blanker voltages by using provided, closed-form, trajectory equations to determine the blanker geometric parameters and compensating for fringe-field effects in order to precisely determine the delay line length for control of an electron or ion beam. This delay line length is maintained by placing alignment apertures above and below the blanker.

High accuracy beam blanker

A field emission source is used in conjunction with a three element asymmetric lens system to provide an electron gun having greater magnitude beam currents focused on a smaller spot size than has been previously possible for intermediate energy beams. The three element asymmetric lens system has a lower spherical aberration than prior art electrostatic guns and a very low chromatic aberration coefficient, enabling precise focusing of beams with large currents and energy spreads. The electron gun produces high current densities in beam focused on small spot areas, despite the relatively large acceptance angle and energy spread of the source beams.

Low Aberration field emission electron gun

An arc suppressor is provided for an electron gun of the type used e.g. in semiconductor lithography equipment. The arc suppressor prevents damaging emission properties of the electron gun either due to variation of the cathode work function or any damage to the emitter apex. The arc suppressor includes a resistance and an inductor in series with each electrode lead providing voltage or current to the various electrodes of the electron gun. The inductance is provided by a ferrite toroid which contains a plurality of holes in addition to the main central hole. The leads for each electrode are wrapped around the toroid through the various holes, with one hole being provided for each lead. Thus advantageously each lead is isolated magnetically from the others, reducing the transformer and capacitive effects that couple one lead to another.

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Oakland, CA, United States of America

Mark A Gesley