Applied Materials, Inc.

Leybold Vacuum Gmbh

Mariusch Gregor

Jayesh S Patel

Dennis R Smith

Karl-Heinz Ronthaler

Heinz Frings

Keith Trenton

Robert Stolle

Rudolph Bahnen

Anja Plugge

A pressure for a chamber is regulated by controlling either the exhaust pressure at the exhaust side of a first vacuum pump or the internal pressure at a compression stage of the first vacuum pump, where the first vacuum pump is directly communicating with the chamber. The pressure of the chamber can be regulated by combinations of the following: controlling the variable rotational frequency of a roots vacuum pump, a pre-vacuum pump, or a high compression pump; controlling a control valve between a pre-vacuum pump and the first vacuum pump; controlling a control valve for injecting gas into the exhaust side of the first vacuum pump or into the compression stage of the first vacuum pump; and controlling a control valve or control valves for bypassing the first vacuum pump or a compression stage or compression stages of the first vacuum pump. To regulate the pressure in the chamber, several types of control rules can be used, including: a PID control rule, a gain scheduler, and a threshold comparison control rule.

Apparatus and method for regulating a pressure in a chamber

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Cologne, Germany

Mariusch Gregor