U.S. Philips Corporation

Maritza G Heijman

Peter Cornelis Zalm

Gijsbertus A Spierings

Gerrit J Van Der Kolk

Johannes H Angenent

Bernard Dam

In a method of manufacturing a device comprising a film of an oxide superconducting material which comprises an alkaline earth metal, another metal component, copper and oxygen. A superconductor precursor material comprising copper oxide, alkaline earth metal fluoride and another metal or metal oxide, is provided on a substrate in the form of a film. The film is covered with a diffusion barrier against water in accordance with a pattern which is complementary to a desired pattern of superconducting material. Subsequently, the superconducting material is formed in the uncovered portions of the pattern by means of a treatment at an increased temperature in the presence of water and oxygen.

Method of patterning superconductive oxide films by use of diffusion

A method is shown of applying in accordance with a pattern thin layers of an oxidic superconductive material onto a substrate in which a copper oxidic based material that after heating is rendered superconducting at a desired service temperature is covered in a desired pattern with a composition that renders the underlying oxidic material non-superconducting.

Method of patterning superconducting oxide thin films

A method of manufacturing a thin film of an oxidic superconducting material in accordance with a pattern, in which a pattern is manufactured by means of etching using reactive ions and a mask of aluminium oxide or silicon oxide, said method enabling patterns having line widths smaller than 2 .mu.m to be manufactured with great accuracy without influencing the composition of the superconducting thin film in such a manner that the superconducting properties deteriorate.

Plasma etch of masked superconductor film

Grooves are etched in a glass substrate, using a metallic mask, after which the substrate is coated with a layer of glass having a refractive index which is higher than that of the substrate, the groove being filled completely. Excess glass is removed, the metallic mask being used as a stop layer and a protective layer being provided at the location of the filled grooves. Excess glass is removed at the location of the grooves by means of polishing so that a high accuracy as regards depth can be obtained.

Method of manufacturing a planar optical component

Method of applying in accordance with a pattern thin layers of oxidic superconductive material onto a substrate, it not being necessary to subject the superconductive material to mechanical or chemical treatments. At its surface the substrate is provided in accordance with a desired pattern with two different material compositions. The first composition is chosen such that the oxidic material applied thereon is superconductive at a desired surface temperature. The second composition is chosen such that the oxidic material applied thereon is not superconductive.

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Eindhoven, Netherlands

Maritza G Heijman