Average Co-Inventor Count = 1.33
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Xinix, Inc. (2 from 8 patents)
2. Luxtron Corporation (1 from 65 patents)
3 patents:
1. 5292605 - Method for control of photoresist develop processes
2. 5196285 - Method for control of photoresist develop processes
3. 5190614 - Method of endpoint detection and structure therefor