Applied Power Inc.

Technical Manufacturing Corporation

Marion Richard Earles, Jr

Andreas Hubertus Von Flotow

Dale W Schubert

Andrew M Beard

Steven Frank Shedd

An active vibration isolation system (10) includes a plurality of stiff actuators, such as piezoelectric motors (12a-c; 284, 350) which support a small mass (18) inside of a case (300). A passive isolator (20) is interposed between the small mass (18) and the payload mass (M.sub.p). In the instance where the stiff actuators are piezoelectric motors, the sidewalls of the case (300) are used to provide compressive force along the variable length of each of the horizontal piezoelectric motor elements (284, 350) to prevent damage to same. Compensation circuitry (24) is connected between velocity sensors (17) and the stiff actuators to control the variable length thereof in this move-out-of-the-way system (10) and to compensate for resonating modes. Optionally, a payload mass velocity sensor (26) and associated circuitry may be used to provide additional control. Shear decouplers (282a-c; 352, 360) are used in conjunction with the piezoelectric motor elements (12a-c; 284, 350) to minimize the amount of shear force acting on the motor elements.

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Marlboro, MA, United States of America

Marion Richard Earles, Jr