Carl Zeiss Smt Gmbh

Marion Batz

Christof Baur

Michael Budach

Markus Bauer

Petra Spies

Ottmar Hoinkis

Daniel Rhinow

Rainer Fettig

Dajana Cujas

Robert Heberlein

David Lämmle

Katharina Gries

Sebastian Vollmar

The present invention relates to a method for examining a beam of charged particles, including the following steps: producing persistent interactions of the beam with a sample at a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution of the persistent interactions at the plurality of positions.

Method and apparatus for examining a beam of charged particles

The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning particle microscope for a particle beam so that the reference object can at least partially be imaged by use of the electron beam; (b) at least one scanning unit operable to scan a particle beam of the scanning particle microscope across at least one portion of the reference object; and (c) at least one setting unit operable to change at least one setting of the scanning particle microscope.

Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope

Growing community of inventors

Wiesbaden, Germany

Marion Batz