Lpe S.p.a.

Mario Preti

Franco Preti

Srinivas Yarlagadda

Natale Speciale

The present invention relates to a reaction chamber of an epitaxial reactor that essentially consists of a quartz piece; the quartz piece comprises a quartz piece portion () having an internal cavity () defined by walls (A,B,C,D); the cavity () comprises a reaction and deposition zone () of the epitaxial reactor; the zone () is adapted to house a susceptor () to be heated therein; the reaction chamber also comprises a quartz component () arranged close to said walls (A,B,C,D) in such a manner as to form a counterwall and to be a wall of said zone ().

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Legnano, Italy

Mario Preti