Carl Zeiss Microscopy Gmbh

Applied Materials Israel Limited

Mario Mützel

Nissim Elmaliach

Haim Eder

Igor Krayvitz (Krivts)

Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.

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Aalen, Germany

Mario Mützel