Gesim Gesellschaft Fur Silizium-mikrosysteme Mbh Rossendorfer Technologiezentrum

Mario Buerger

Steffen Howitz

The invention relates to a method of producing a 3-D microscope flow-through cell, consisting of an upper and a lower substrate between which is located a flow channel, an electrode structure penetrating the flow channel and connected with external contacts and with through-connections at the ends of the flow channel for the connection of fluid inlets and outlets. The invention provides a method of producing 3-D microscope micro flow-through cells that are suitable for the reversible assembly of microscope flow-through cells for the &#x3bc;m-volume range. According to the invention, this is obtained in that a base substrate is first provided with access holes and a flow channel, the flow channel being made of a sandwich of a material non-elastic inside and elastic outside, in that the flow channel for the purpose of a fluid-tight channel closure, is pressed against a second cover glass in order to provide a reversibly sealable flow channel.

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Pirna, Germany

Mario Buerger