Asml Netherlands B.v.

Marinus Augustinus Christiaan Verschuren

Marcus Adrianus Van De Kerkhof

Bastiaan Lambertus Wilhelmus Marinus Van De Ven

Thomas Poiesz

Matthias Kruizinga

Koos Van Berkel

Johannes Adrianus Cornelis Maria Pijnenburg

Peter Van Delft

Tammo Uitterdijk

Oleksiy Galaktionov

Roger Franciscus Mattheus Maria Hamelinck

Kjeld Gertrudus Hendrikus Janssen

Johannes Bernardus Charles Engelen

Shahab Shervin

A substrate restraining system comprising: a substrate table and a plurality of circumferentially arranged restrainers each comprising a spring, wherein the spring has a proximal end and a distal end, wherein the distal end of the spring is radially displaceable, and wherein a base of the proximal end of the spring is fixed to the substrate table at a fixing location.

Substrate restraining system

An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; and a circumferential barrier for reducing outflow of gas escaping from space between the object and the core body.

Object holder, electrostatic sheet and method for making an electrostatic sheet

Growing community of inventors

Helmond, Netherlands

Marinus Augustinus Christiaan Verschuren