Sumitomo Heavy Industries, Ltd.

Marino Watanabe

Akira Kondo

Shinya Hamada

Tatsuya Yoshida

There is provided a control device that controls a controlled variable of a control target to a target value by controlling a flow rate of gas supplied to and discharged from the control target by a spool type flow control valve. The control device includes a controller that generates a spool position command of the spool type flow control valve, based on the target value, and a non-linear compensator that applies a correction for linearly compensating for non-linear flow rate characteristics of the spool type flow control valve to the generated spool position command, and outputs the command to the spool type flow control valve.

Control device for spool type flow control valve

Provided is a fluid actuator capable of safely driving a drive target. An air actuator using air as a working fluid includes an X-axis pressure sensor that measures air pressures PX+ and PX&#x2212; along one drive axis, which drives a drive target in an X direction, a Y-axis pressure sensor that measures air pressures PY+, PY&#x2212;, PY+, and PY&#x2212; along two drive axes, which drive the drive target in a Y direction, and an acceleration detection unit that detects translational acceleration and rotational acceleration generated in the drive target on the basis of the measured air pressures PX+, PX&#x2212;, PY+, PY&#x2212;, PY+, and PY

Growing community of inventors

Kanagawa, Japan

Marino Watanabe