Murata Manufacturing Co., Ltd.

Asm International N.v.

Precordior Oy

Marika Juppo

Mikko Ritala

Ulf Meriheinä

Tero Koivisto

Kati Sairanen

Mikko Pankaala

Markku Leskel&auml;

Petra Al&eacute;n

Mikko Pänäälä

Markus Grönholm

Markus Gronholm

Ulf Meriheina

Mikko PÄNKÄÄLÄ

A device that includes a sensor of angular motion configured to obtain an angular ballistograph signal indicative of rotational movement of a chest of a subject. Signal processing means are configured to generate from this angular ballistocardiograph signal measured values of an output parameter, which is indicative of cardiac operation of the subject.

Heart monitoring system

Methods for producing metal nitride thin layers having low resistivity by means of atomic layer deposition processes comprising alternate surface reactions of metal and nitrogen source materials include using nitrogen source materials that have better reducing properties than ammonia and 1,1-dimethyl hydrazine. Suitable compounds for that purpose include those in which a hydrocarbon group bound to nitrogen, when dissociating in a homolytic manner, generates a radical that serves as a reducing agent and reacts further to generate atomic hydrogen. The nitride thin layers produced are especially suitable for use as diffusion barrier layers in integrated circuits.

Method for preparing metal nitride thin films

Growing community of inventors

Espoo, Finland

Marika Juppo